Instrument information
- Machine/ Equipment: Nano Calc
- Student/ Responsible personnel: Ranomay and Hemant
- Cost (per hour or per session/ sample): Rs. 50/hr.
- Probable day and timings per week: Weeekdays
About machine
The Nano Cal-c is a thin film measurement instrument which is capable of measurement of stacks of transparent films upto 500nm. It is based on the principle of reflectance measurements carried out by a laser and detector. It can be used to measure the thickness of oxides, SiNx, photoresists and other semiconductor process films. In addition to these single-layer applications, many two- and three-layer film measurements are also possible.
Machine Specification
Name: NanoCalc-2000-UV/VIS
Wavelength: 250-850nm,
Thickness: 10nm....20µm,
Spectrometer, A/D-Converter, USB- and RS232-Interface, Deuterium-HalogenLightsource, Reflection Probe, NanoCalc Software